Why do they not "stick" ?
Just came across another "suggested alternate to ArFi" litho - http://www.nanowerk.com/nanotechnology_articles/newsid=47727.php - "self-collapse litho" In fact the article itself lists various other "molecular patterning strategies" that are/were tried - s oft lithographic microcontact printing (µCP), replica molding, nanoimprint lithography, polymer pen lithography, nanotransfer printing, decal transfer printing, and nanoskiving. Add to it the "multi ebeams" and DSAs and then those fancy named ones - SCALPEL:Scattering with angular limitation projection electron beam lithography ; PREVAIL: Projection Reduction Exposure with Variable Axis Immersion Lenses ; LEEPL: Low Energy Ebeam Projection Litho .. Nothing "stuck" -pun intended - on the wafer ! Closest seems to be EUV, but thats yet again changing the source for a mask-based litho.. indeed in this case the change to a reflective system is a big one Con...